As KYKY over 60 years SEM manufacture experience, the whole EM series supports old system refurbished and customized system as SEM+, such as Electron Beam Lithography remodel, LaB6 upgrade,integrated with STM,AFM,Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator etc. System also has multiple interface at chamber for attaching most of the analysis detector in the market

Advanteges:

◆ Optional low vacuum modules(LVSE,LVBSE)

◆ Rich automation functions

◆ Column/Chamber/Electric System Customization

◆ Optional Big size chamber

◆ Wide field navigation camera

◆ Rich expanding attachments

Specifications:

KYKY TECHNOLOGY CO., LTD., was founded in 1958, the pioneer of vacuum technology and electron optics in China. In the past 60 years, KYKY has been dedicated to providing comprehensive vacuum solutions to the customers all over the world.

KYKY invented the first set of Turbo Molecular Pump, Commercial Helium Leak Detector and Scanning Electron Microscope in China.

KYKY offers vacuum technology solutions, consultation and services to our customers. The main products are applied in the fields of Life Science, Medicine Engineering, Automobile Industry, Aerospace, Energy Industry, Construction Materials, Modern Decoration, High-end Consumer Electronics, etc.

In the spirit of technology innovation and customer orientation. KYKY will continuously contribute to the further development in vacuum industry of China.

KYKY TECHNOLOGY CO., LTD. has many years of experiences in R & D and manufacturing of vacuum generation products, including series molecular pumps, series molecular pump stations, series ion pumps, series gate valves and supporting controllers.

Since developing the first vertical turbo molecular pump in 1970’s, KYKY always orients

to the demand-driven market, aims to meet the requirement of our customers, and continuously launches new products in the enterprise spirit of developing on innovation, Sequentially KYKY launches Oil- lubricated series turbo molecular pumps, grease-lubricated series molecular pumps and CXF-series magnetically levitated

molecular pumps.

KYKY molecular pumps are widely applied to instrument fields of mass spectrometers and surface analyzers, to optical filming, panel display, ion etching, disc manufacturing, solar cells and lighting enterprises, and to academic institutions and R & D institutes. By virtue of excellent cost performance, these products win good reputation from the majority of users. High quality products are derived from our continuous technical breakthrough and pursuit of quality.

KYKY will persistently provide better products and quality services for customers by our continuous innovation, passion and

commitment.