Maglev Pump , CXF-320/3000E , Waterr cooling , ISO-F , External controller

The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.

Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.

The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.

The advantages:

1. Zero friction during operation, and low power consumption

2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps

3. Capable of extracting corrosive gases for long term

4. High safety and long service life due to protection of bearings with precision ceramic balls

5. power generating function in case of sudden power-off

6. Free of friction

7. Free of pollution

8. Free of maintenance

9. Low vibration

10. installed in any orientation.

Technologies:

• Control Technology for Magnetic Bearing: 5-axis magnetically levitated. This design can have dynamic response and timely adjustment by means of dynamic active closed-circuit magnetic suspension control technology based on advanced international control theory, so as to guarantee such significant advantages of the high-speed shafting as stable levitated and reliable operation.
• Motor Drive Control Technology: High-efficiency high-speed DC motor and servo control system are applied to series magnetically levitated pumps, so to have maximum energy of the motor and to compensate the rotating speed of shafting automatically, thereby realizing stable start-up, reliable operation and automatic regulating function of dynamic energy.
• Carbon fiber composite rotor technology: The turbo rotors of serial magnetic suspension molecular pumps are made by compounding high-strength aluminum alloy and light-weight carbon fiber. In comparison with all aluminum alloy rotors, the turbo rotors are characterized of great reduction of weight and great improvement of strength, so that targets of high rotating speed, high performance and high reliability are achieved.
• Corrosion resisting technology: Surfaces of parts in chambers of serial magnetic suspension molecular pumps are treated with special process, so that the surfaces can resist corrosion caused by corrosive gases in semiconductor manufacturing processes for a long time. In addition, such inert gases as N2 are fully filled in shafting of the pumps to protect the low vacuum parts in the pumps, so that function of stably exhausting corrosive gases for long periods is realized.
• Heating temperature control system: Series magnetically levitated molecular pumps are equipped with an electric heater and a temperature controller, so that cooling water, air-bone heating, electric heating and heat carried by protective gases can be monitored and controlled during operation, temperature in the pumps can be maintained at some value for long term, some gaseous substances are not converted into solid substances at normal temperature and not deposited in the pumps, and requirements for special process such of etching can be met.

Specifications:

Applications:

Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.

KYKY TECHNOLOGY CO., LTD., was founded in 1958, the pioneer of vacuum technology and electron optics in China. In the past 60 years, KYKY has been dedicated to providing comprehensive vacuum solutions to the customers all over the world.

KYKY invented the first set of Turbo Molecular Pump, Commercial Helium Leak Detector and Scanning Electron Microscope in China.

KYKY offers vacuum technology solutions, consultation and services to our customers. The main products are applied in the fields of Life Science, Medicine Engineering, Automobile Industry, Aerospace, Energy Industry, Construction Materials, Modern Decoration, High-end Consumer Electronics, etc.

In the spirit of technology innovation and customer orientation. KYKY will continuously contribute to the further development in vacuum industry of China.

KYKY TECHNOLOGY CO., LTD. has many years of experiences in R & D and manufacturing of vacuum generation products, including series molecular pumps, series molecular pump stations, series ion pumps, series gate valves and supporting controllers.

Since developing the first vertical turbo molecular pump in 1970’s, KYKY always orients

to the demand-driven market, aims to meet the requirement of our customers, and continuously launches new products in the enterprise spirit of developing on innovation, Sequentially KYKY launches Oil- lubricated series turbo molecular pumps, grease-lubricated series molecular pumps and CXF-series magnetically levitated

molecular pumps.

KYKY molecular pumps are widely applied to instrument fields of mass spectrometers and surface analyzers, to optical filming, panel display, ion etching, disc manufacturing, solar cells and lighting enterprises, and to academic institutions and R & D institutes. By virtue of excellent cost performance, these products win good reputation from the majority of users. High quality products are derived from our continuous technical breakthrough and pursuit of quality.

KYKY will persistently provide better products and quality services for customers by our continuous innovation, passion and

commitment.